CHY-T1200C-5Z-4C 1200 degree Three Heating Zone CVD System with 5 Gas Mixer

CHY-T1200C-5Z-4C 1200 degree Three Heating Zone CVD System is combined with a 1200 degree three heating zone vacuum tube furnace, one 5 gas mixer with MFC accuracy gas flow control and a rotary vacuum pump for max 100Pa degree. It is widely used for laboratory 2D material preparation.

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Products Description

Modle No.	CHY-T1250C-5Z4C	CHY-T1260C-5Z4C	CHY-T1280C-5Z4C	CHY-T12100C-5Z4C
Heating zones	three heating zone
Heating zone length	220+440+220mm
Constant temperature zone length	130+440+130mm
Tube Material	high purity quartz tube
Tube Dimension(mm)	O.D50I.D44L1400	O.D60I.D54L1400	O.D80I.D74L1400	O.D100I.D94L1400
Thermcouple	K type
Maximum heating temper	1150 dgree
Heating rate	20c/min, adjustable suggestion 10 degree/min
Heating element	Fe-Co-Al by Mo alloy
Sealing Method	stainless steel vacuum flange
Vacuum Air-tightness	9.8×10-4Pa
Temperature Accuracy	±1℃
Control Mode	Intelligent PID programmable Control, 30 steps sintering curve restore
Mass Flow Controller	3 gas way mass flow controller
Flowmeter Core	304 stainless steel
Measure Accuracy	+/- 1.0% F.S
Pressure Range	-0.1~0.15MPa
A way gas range	0~100SCCM
B way gas range	0~200SCCM
C way gas range	0~500SCCM
D way gas range	0~500SCCM
E way gas range	0~1000SCCM, or as customized
Vacuum Pump	VRD-4C
Power Supply	AC220V 50Hz