CHY-T1700A-3Z4C 1700 degree CVD System with 3 gas MFC station

CHY-T1700A-3Z4C 1700 degree CVD system is combined with a 1700 degree single zone vacuum tube furnace, one 3 gas mixer with MFC accuracy gas flow control and a rotary vacuum pump for max 100Pa degree. It is widely used for laboratory 2D material preparation.

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Products Description

Modle No.	CHY-T1750A-3Z4C	CHY-T1760A-3Z4C	CHY-T1780A-3Z4C
Heating zones	Single heating zone; two heating zone or three heating zone for option
Heating zone length	300mm
Constant temperature zone length	100mm
Tube Material	high purity Corundum tube
Tube Dimension(mm)	O.D50I.D40L1000	O.D60I.D50L1000	O.D80I.D70L1000
Thermcouple	B type
Maximum heating temper	1650 dgree
Heating rate	suggestion<10 degree/min
Heating element	MoSi2
Sealing Method	stainless steel vacuum flange
Vacuum Air-tightness	9.8×10-4Pa
Temperature Accuracy	±1℃
Control Mode	Intelligent PID programmable Control, 30 steps sintering curve restore
Mass Flow Controller	3 gas way mass flow controller
Flowmeter Core	304 stainless steel
Measure Accuracy	+/- 1.0% F.S
Pressure Range	-0.1~0.15MPa
A way gas range	0~100SCCM
B way gas range	0~200SCCM
C way gas range	0~500SCCM, or as customized
Vacuum Pump	VRD-4C
Power Supply	AC220V 50Hz