Do You Have Any Questions?

Submit a business inquiry online.

AC300-SE Programmable Control Spin Coater for max 12" wafer

AC300-SE Programmable Control Spin Coater for max 12" wafer

High precision servo motor drive, high precision, high repeatability

PLC control, 7-inch full-color touch screen operation, HDPE inner chamber, solvent resistant PC transparent cover

Can add back cleaning and edge removal glue functions to meet industrial machine applications

Can add splash proof cleaning and development functions to meet customization needs

Processable substrate size range: fragments smaller than 1cm to 12-inch circular substrates


Products Description

Model No.AC300-SE
Max.Wafer Diameter1cm-12”
Speed adjustable range20~5000rpm,adjustable
Acceleration range20~10000rpm/s
Speed resolution1rpm
Max single step time3000s
Time resolution0.1s
Programmable control100 programmable,100steps
MotorDC servo Motor
Vacuum plateO. D 4", 6" 8"for option
Working voltageAC220V, 50Hz
Dimension580*645*405mm



WeChat
WeChat