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EZ6 Compact Vacuum Spin Coater max for 6" wafer

EZ6 Compact Vacuum Spin Coater max for 6" wafer

EZ6 is an economic desktop Vacuum Spin Coater with vacuum chunk which is designed for quality coating max 6" wafer.

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Products Description

Model No.EZ6
Coating speed100~1200rpm
Rotating resolution1rpm
Adjustable range of acceleration100~30000rpm/s
Max time of each step3000s
Programmable10 program, 10 steps
Vacuum chuck10mm,25mm,2" included
Power supplyAC110V/220V
Dimension295*366*270mm

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