Model No. | EZ4 |
Chamber size | 1. Chamber diameter: 134mm diameter 2. wafer sample size: 1cm~4" |
Vacuum Chuck | 10mm,25mm,2" centering chuck total 3 Pieces standard vacuum chuck included |
Spin Speed | 1. Digital display with variable speed up 100 to 9999 RPM 2. Programmable segments of different spin times, 5 programmable with 5 steps of each program. 3. Speed resolution: 1rpm |
Voltage | Wide range AC100~230V, adjustable |
Diamension | 250*210*200mm |
Gross weight | 16kg |