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The VTC-100 vacuum spin coater is suitable for semiconductor processes, plate making, and surface coating. It adopts a vacuum adsorption sample method, making the sample easy to pick up and place, reducing the previous cumbersome operation procedures. Standard vacuum chuck include φ 25mm, φ 50mm, φ100mm each size one piece, suitable for coating different sizes of silicon wafers and other materials
Products Description
| Model No. | VTC-100 |
| Power supply | AC220/50Hz;Rated power:≤150W |
| Sample Holder | Polypropylene vacuum chuck :Φ25mm, Φ50mm Φ100mm each one piece |
| Running mold | two operating stages for counterclockwise rotation |
| Spin speed | SPD1 : 500~8000RPM; SPD2:500~8000RPM |
| Coating time | Time 1: 1~600s; Time 2: 1~600s |
| Rotating stability | ±1% |
| Dimension | 380mm×260mm×330mm |
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