CHY-3F Three Channel Gas Mixing Control Station with Float Flow Controller

CHY-3F gas mixing station is designed for the control of various types of gasses flowing through vacuum-sealed tube furnaces called for CVD system. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top.

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Products Description

Model No.	CHY-3F
Mass Flow Controller	3 gas way float flow controller
Flowmeter Core	304 stainless steel
Measure Accuracy	Accuracy: 20%F.S
Pressure Range	-0.1~0.15MPa
A way gas range	10~100ml/min
B way gas range	10~200ml/min
C way gas range	10~500ml/min, or as customized
Working temperature	5~45 ºC
Dimension	700600580mm