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CHY-3Z gas mixing station is designed for the control of various types of gasses flowing through vacuum-sealed tube furnaces called for CVD system. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top.
Products Description
| Model No. | CHY-3Z | |||
| Mass Flow Controller | 3 gas way mass flow controller | |||
| Flowmeter Core | 304 stainless steel | |||
| Measure Accuracy | Accuracy: ±1.5%FS Linearity: ±1%FS Repeatability: ±0.2%FS | |||
| Pressure Range | -0.1~0.15MPa | |||
| A way gas range | 0~100SCCM | |||
| B way gas range | 0~200SCCM | |||
| C way gas range | 0~500SCCM, or as customized | |||
| Working temperature | 5~45 ºC | |||
| Power Supply | AC220V 50Hz | |||
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