CHY-10SMT 13.56MHz Vacuum Plasma Cleaner with 10L Quartz Chamber

CHY-10SMT is a compact vacuum plasma cleaner with quartz chamber.The chamber size is Φ200×320Lmm with 13.56MHz frequency power.It is equipped with two float flow meter can allows gas insert.Accuracy MFC is availiable.

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Products Description

Model No.	CHY-10SMT
Chamber Material	Quartz Chamber or Stainless Steel
Chamber Size	Quartz:Φ200×320Lmm; S.S :220260200mm

Capacity	10L
Working Frequency	13.56MHz（Auto Match）
Power	0-300W（Adjustable);600W for option
Flowmeter	2 way float flow meter;10-160ml/min adjustable
Vacuum Gauge	Pressure gauge (quantified value display)
Control Mode	Fully automatic control and manual (PLC interface)
Cleaning time	0- 99999S Adjustable
Vacuum Degree	10-300pa
Chamber Temper	＜30℃
Power Supply	220V/50Hz
Vacuum Pump	VRD-8
Dimension	650×550×580mm