CHY-15S 40KHz Vacuum Plasma Cleaner with 10L Chamber size

CHY-15S is a vacuum plasma cleaner with Stainless steel chamber.The chamber size is 260mm×320mm×200mm with 40KHz frequency power.It is equipped with two float flow meter can allows gas insert.Accuracy MFC is availiable.

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Products Description

Model No.	CHY-15S
Display	LCD touch controller
Working voltage	AC 220V, 50Hz
RF Frequency	40KHz
RF power	0~300 w;600W for option
RF offset	< 0.2KHz
Characteristic impedance	50Ω, automatic matching
Vacuum degree	30-100Pa, equipped with a mechanical pump
Gas speed	Two way Float Flow Gas Control:10-160ml/min, adjustable
Control	MCU Auto Control or Mannually adjustable
Inner chamber size	Chamber Dimension :220 ×260×200mm
Pressure Gauge	A simple digital pressure gauge is equipped for reading
Clearing time	1-9999S adjustable
Cooling way	Forced cooling
Outer dimension	580×600×480mm