Model No. | CHY-15ST | |
Chamber Material | Stainless Steel | |
Chamber Size | 370×320×130mm | |
Capacity | 15L | |
Working Frequency | 13.56MHz(Auto Match) | |
Power | 0-600W(Adjustable);300W for option | |
Flowmeter | 2 way float flow meter;10-160ml/min adjustable | |
Vacuum Gauge | Pressure gauge (quantified value display) | |
Control Mode | Fully automatic control and manual (PLC interface) | |
Cleaning time | 0- 99999S Adjustable | |
Vacuum Degree | 10-300pa | |
Chamber Temper | <30℃ | |
Power Supply | 220V/50Hz | |
Vacuum Pump | VRD-16 | |
Dimension | 650x600x750mm |