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CHY-5S 40KHz Plasma Cleaner with 5L Stainless Steel Chamber

CHY-5S 40KHz Plasma Cleaner with 5L Stainless Steel Chamber

CHY-5S is a vacuum plasma cleaner with Stainless steel chamber.The chamber size is Φ150mm×270mm with 40KHz frequency power.It is equipped with two float flow meter can allows gas insert.Accuracy MFC is availiable.

Products Description

Model No.CHY-5S
DisplayLCD touch controller
Working voltageAC 220V, 50Hz
RF Frequency40KHz
RF power0~300 w
RF offset< 0.2KHz
Characteristic impedance50Ω, automatic matching
Vacuum degree10-1000Pa, equipped with a mechanical pump
Gas speedTwo way Float Flow Gas Control:10-160ml/min, adjustable
ControlMCU Auto Control or Mannually adjustable
Inner chamber sizeChamber Dimension: Φ150mm×270mm; Capacity: 5L
Pressure GaugeA simple digital pressure gauge is equipped for reading
Clearing time1-9999S adjustable
Cooling wayForced cooling
Outer dimension 560x540x410mm
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